Spatial Resolution for Dielectric Measurement Using...

Japanese Journal of Applied Physics 2006 / 9 Vol. 45; Iss. 9B

Spatial Resolution for Dielectric Measurement Using Non-Contact Microwave Probe and In-Plane Dielectric Mappings for Dielectric Device

Kakemoto, Hirofumi, Li, Jianyong, Harigai, Takakiyo, Nam, Song-Min, Wada, Satoshi, Tsurumi, Takaaki
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.7503
Date:
September, 2006
File:
PDF, 78 KB
english, 2006
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