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Guiding Principle of Energy Level Controllability of Silicon Dangling Bonds in HfSiON
Umezawa, Naoto, Shiraishi, Kenji, Miyazaki, Seiichi, Uedono, Akira, Akasaka, Yasushi, Inumiya, Seiji, Hasunuma, Ryu, Yamabe, Kikuo, Momida, Hiroyoshi, Ohno, Takahisa, Ohmori, Kenji, Chikyow, Toyohiro,Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.1891
Date:
April, 2007
File:
PDF, 154 KB
english, 2007