Fin-Type Field-Effect Transistor NAND Flash with...

Japanese Journal of Applied Physics 2007 / 4 Vol. 46; Iss. 4B

Fin-Type Field-Effect Transistor NAND Flash with Nitride/Silicon Nanocrystal/Nitride Hybrid Trap Layer

Choe, Jeong-Dong, Lee, Se-Hoon, Lee, Jong Jin, Cho, Eun Suk, Ahn, Youngjoon, Choi, Byoung Yong, Sung, Suk Kang, No, Jintae, Chung, Ilsub, Park, Kyucharn, Park, Donggun
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.2197
Date:
April, 2007
File:
PDF, 179 KB
english, 2007
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