Frictional Characterization of Chemical–Mechanical...

Japanese Journal of Applied Physics 2008 / 8 Vol. 47; Iss. 8

Frictional Characterization of Chemical–Mechanical Polishing Pad Surface and Diamond Conditioner Wear

Yamada, Yohei, Kawakubo, Masanori, Hirai, Osamu, Konishi, Nobuhiro, Kurokawa, Syuhei, Doi, Toshiro
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6282
Date:
August, 2008
File:
PDF, 437 KB
english, 2008
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