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Influence of Ar and NH 3 Plasma Treatment on Surface of Poly(monochloro- para -xylylene) Dielectric Films Processed in Oxygen Plasma
Shutov, Dmitriy A., Kang, Seung-Youl, Baek, Kyu-Ha, Suh, Kyung Soo, Kwon, Kwang-HoVolume:
47
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.6970
Date:
August, 2008
File:
PDF, 430 KB
2008