Dependence of Plasma Density on Air Gap Length of Resonant...

Japanese Journal of Applied Physics 2009 / 8 Vol. 48; Iss. 8

Dependence of Plasma Density on Air Gap Length of Resonant Cavity with Bottom Plate Replaced by High-Density Plasma

Kogoshi, Sumio, Yoshioka, Yu, Katayama, Noboru, Kudo, Yusuke
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Volume:
48
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.48.08HB01
Date:
August, 2009
File:
PDF, 151 KB
english, 2009
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