Effect of Argon/Hydrogen Plasma Cleaning on Electroless Ni...

Japanese Journal of Applied Physics 2010 / 8 Vol. 49; Iss. 8

Effect of Argon/Hydrogen Plasma Cleaning on Electroless Ni Deposition on Small-Area Al Pads

Ikeda, Akihiro, Kajiwara, Kouhei, Watanabe, Naoya, Asano, Tanemasa
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.08JA05
Date:
August, 2010
File:
PDF, 216 KB
english, 2010
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