Analysis of Plasma Wall Reactions Using Virtual Optical...

Analysis of Plasma Wall Reactions Using Virtual Optical Emission Spectrometry Signal during Dielectric Etching

Kuboi, Nobuyuki, Fukasawa, Masanaga, Kawashima, Atsushi, Oshima, Keiji, Nagahata, Kazunori, Tatsumi, Tetsuya
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Volume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.49.08JD01
Date:
August, 2010
File:
PDF, 300 KB
english, 2010
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