Study on Quartz Multitier Mold Fabrication Using Gray Scale...

Japanese Journal of Applied Physics 2011 / 6 Vol. 50; Iss. 6

Study on Quartz Multitier Mold Fabrication Using Gray Scale Laser Beam Lithography

Youn, Sung-Won, Park, Sang-Cheon, Wang, Qing, Suzuki, Kenta, Hiroshima, Hiroshi
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.06GK03
Date:
June, 2011
File:
PDF, 106 KB
english, 2011
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