Advanced Contactless Analysis of Plasma-Induced Damage on...

Japanese Journal of Applied Physics 2011 / 8 Vol. 50; Iss. 8

Advanced Contactless Analysis of Plasma-Induced Damage on Si by Temperature-Controlled Photoreflectance Spectroscopy

Matsuda, Asahiko, Nakakubo, Yoshinori, Takao, Yoshinori, Eriguchi, Koji, Ono, Kouichi
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08KD03
Date:
August, 2011
File:
PDF, 300 KB
english, 2011
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