The structure study of thin semiconductor and dielectric...

The structure study of thin semiconductor and dielectric layers by synchrotron radiation diffraction

G.S Yurjev, V.P Nazmov, V.I Kondratjev, M.A Sheromov, M.A Korchaggin
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Volume:
448
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0168-9002(00)00228-x
File:
PDF, 361 KB
english, 2000
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