PMMA-based resists for a spectral range near 13 nm

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2000 Vol. 448; Iss. 1-2

PMMA-based resists for a spectral range near 13 nm

S.A Bulgakova, A.Ya Lopatin, V.I Luchin, L.M Mazanova, S.A Molodnjakov, N.N Salashchenko
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Volume:
448
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0168-9002(00)00237-0
File:
PDF, 155 KB
english, 2000
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