Submicrosecond X-ray lithography
Nagel, D.J., Peckerar, M.C., Whitlock, R.R., Greig, J.R., Pechacek, R.E.Volume:
14
Year:
1978
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:19780528
File:
PDF, 399 KB
english, 1978