Control of high-valued polysilicon resistors by...

Control of high-valued polysilicon resistors by hydrogenation techniques

R.Della Marina, M.Federico S. Tritto, P. Weiss
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Volume:
461
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0168-9002(00)01186-4
File:
PDF, 296 KB
english, 2001
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