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Nanoindentation technique for characterizing cantilever beam style RF microelectromechanical systems (MEMS) switches
Lee, Hyukjae, CoutuJr, Ronald A, Mall, Shankar, Kladitis, Paul EVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/6/013
Date:
June, 2005
File:
PDF, 246 KB
english, 2005