Influence of microwave annealing on optical and electrical properties of plasma-induced defect structures in Si substrate
Iwai, Takaaki, Eriguchi, Koji, Yamauchi, Shohei, Noro, Naotaka, Kitagawa, Junichi, Ono, KouichiVolume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4927128
Date:
November, 2015
File:
PDF, 2.13 MB
english, 2015