High-throughput nanogap formation by field-emission-induced...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 09 Vol. 33; Iss. 5

High-throughput nanogap formation by field-emission-induced electromigration

Ito, Mitsuki, Morihara, Kohei, Toyonaka, Takahiro, Takikawa, Kazuki, Shirakashi, Jun-ichi
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4927443
Date:
September, 2015
File:
PDF, 3.07 MB
english, 2015
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