SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Optical Measurement Systems for Industrial Inspection IV - Modern approaches in phase measuring metrology (Invited Paper)
Millerd, James, Brock, Neal, Hayes, John, Kimbrough, Brad, Novak, Matt, North-Morris, Michael, Wyant, James C., Osten, Wolfgang, Gorecki, Christophe, Novak, Erik L.Volume:
5856
Year:
2005
Language:
english
DOI:
10.1117/12.621581
File:
PDF, 688 KB
english, 2005