Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2001 Vol. 467-468; Iss. part-P2
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Study of local strain distribution in semiconductor devices using high-resolution X-ray microbeam diffractometry
K. Yokoyama, S. Takeda, M. Urakawa, Y. Tsusaka, Y. Kagoshima, J. Matsui, S. Kimura, H. Kimura, K. Kobayashi, T. Ohhira, K. Izumi, N. MiyamotoVolume:
467-468
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0168-9002(01)00578-2
File:
PDF, 237 KB
english, 2001