Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
2001 Vol. 467-468; Iss. part-P2
Setup for in situ X-ray diffraction studies of thin film growth by magnetron sputtering
K. Ellmer, R. Mientus, V. Weiß, H. RossnerVolume:
467-468
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0168-9002(01)00637-4
File:
PDF, 176 KB
english, 2001