A Novel Method of Electron Beam Recording on a Si Wafer

A Novel Method of Electron Beam Recording on a Si Wafer

Munakata, Chusuke, Miyazaki, Masaru
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Volume:
20
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.20.L293
Date:
April, 1981
File:
PDF, 457 KB
english, 1981
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