Detection of Neutral Species in Silane Plasma Using...

Japanese Journal of Applied Physics 1983 / 1 Vol. 22; Iss. Part 2, No

Detection of Neutral Species in Silane Plasma Using Coherent Anti-Stokes Raman Spectroscopy

Hata, Nobuhiro, Matsuda, Akihisa, Tanaka, Kazunobu, Kajiyama, Koichi, Moro, Norio, Sajiki, Kazuaki
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
22
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.22.L1
Date:
January, 1983
File:
PDF, 231 KB
english, 1983
Conversion to is in progress
Conversion to is failed