Excimer-Laser-Induced Chemical Vapor Deposition of...

Japanese Journal of Applied Physics 1985 / 12 Vol. 24; Iss. Part 1, No

Excimer-Laser-Induced Chemical Vapor Deposition of Hydrogenated Amorphous Silicon

Yamada, Akira, Konagai, Makoto, Takahashi, Kiyoshi
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Volume:
24
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.24.1586
Date:
December, 1985
File:
PDF, 601 KB
1985
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