Fabrication of Submicron Contact Hole with a Focused Ion...

Japanese Journal of Applied Physics 1990 / 7 Vol. 29; Iss. Part 2, No

Fabrication of Submicron Contact Hole with a Focused Ion Beam

Yasuoka, Yoshizumi, Harakawa, Kenichi, Gamo, Kenji, Namba, Susumu
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Volume:
29
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1221
Date:
July, 1990
File:
PDF, 544 KB
english, 1990
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