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Low-Temperature Polysilicon Thin Film Transistors by Non-Mass-Separated Ion Flux Doping Technique
Masumo, Kunio, Kunigita, Masaya, Takafuji, Satoshi, Nakamura, Nobuhiro, Iwasaki, Atsushi, Yuki, MasanoriVolume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L2377
Date:
December, 1990
File:
PDF, 551 KB
1990