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Focused Ion Beam Induced Deposition in the High Current Density Region
Takahashi, Yoshio, Madokoro, Yuuichi, Ishitani, TohruVolume:
30
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.30.3233
Date:
November, 1991
File:
PDF, 242 KB
english, 1991