Sputtered W-Ti Film for X-Ray Mask Absorber
Yabe, Hideki, Marumoto, Kenji, Aya, Sunao, Yoshioka, Nobuyuki, Fujino, Takeshi, Watakabe, Yaichiro, Matsui, YasujiVolume:
31
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.31.4210
Date:
December, 1992
File:
PDF, 1.10 MB
1992