Effects of Ion Species on Reactive-Ion-Beam-Sputtered Zr-N...

Japanese Journal of Applied Physics 1993 / 1 Vol. 32; Iss. Part 2, No

Effects of Ion Species on Reactive-Ion-Beam-Sputtered Zr-N Films

Yoshitake, Masaaki, Nosaka, Toshikazu, Okamoto, Akio, Ogawa, Soichi
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Volume:
32
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L113
Date:
January, 1993
File:
PDF, 246 KB
english, 1993
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