Accuracy Improvement of Shot Leveling and Focusing with...

Japanese Journal of Applied Physics 1994 / 12 Vol. 33; Iss. Part 1, No

Accuracy Improvement of Shot Leveling and Focusing with Interferometry for Optical Lithography

Nakayama, Yasuhiko, Watanabe, Masahiro, Oshida, Yoshitada, Yoshida, Minoru
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.6866
Date:
December, 1994
File:
PDF, 248 KB
english, 1994
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