Temperature Dependence of Boron Adsorption during $\bf...

Japanese Journal of Applied Physics 1994 / 1 Vol. 33; Iss. Part 2, No

Temperature Dependence of Boron Adsorption during $\bf HBO_{2}$ Irradiation on Si(111) Surface Evaluated by Reflection High-Energy Electron Diffraction

Kumagai, Yoshinao, Ishimoto, Kouichi, Mori, Ryosuke, Hasegawa, Fumio
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1
Date:
January, 1994
File:
PDF, 320 KB
english, 1994
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