Plasma-Enhanced Diamond Nucleation on Si
Katoh, Masahiro, Aoki, Makoto, Kawarada, HiroshiVolume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L194
Date:
February, 1994
File:
PDF, 421 KB
english, 1994