Crude Estimates of Diffusivity and Supersaturation of...

Japanese Journal of Applied Physics 1994 / 4 Vol. 33; Iss. Part 2, No

Crude Estimates of Diffusivity and Supersaturation of Silicon Self-Interstitials Injected by Thermal Oxidation of Czochralski Silicon

Yamanaka, Hideki, Aoki, Yoshihira
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Volume:
33
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L559
Date:
April, 1994
File:
PDF, 572 KB
english, 1994
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