Anomaly in Sputtering on Titanium Nitride Film Growth by...

Japanese Journal of Applied Physics 1996 / 1 Vol. 35; Iss. Part 1, No

Anomaly in Sputtering on Titanium Nitride Film Growth by Post-Irradiation Processing *1

Min, Kyung-youl, Suzuki, Yosuke, Mitsuhashi, Riichirou, Inoue, Masahiko, Shimizu, Ryuichi, Hohmann, Siegfried
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Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.221
Date:
January, 1996
File:
PDF, 984 KB
1996
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