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Time-Resolved Reflection High-Energy Electron Diffraction Analysis in Initial Stage of 3C-SiC Growth on Si(001) by Gas Source Molecular Beam Epitaxy
Hatayama, Tomoaki, Fuyuki, Takashi, Matsunami, HiroyukiVolume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.5255
Date:
October, 1996
File:
PDF, 1.86 MB
1996