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Impact of Hydrogenating Plasma Induced Oxide Charging Effects on the Characteristics of Polysilicon Thin Film Transistors
Lee, Kan Yuan, Fang, Yean Kuen, Cheng, Chii Wen, Huang, Kou Chin, Liang, Mong Song, Wuu, Sou GowVolume:
36
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.1025
Date:
March, 1997
File:
PDF, 405 KB
english, 1997