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Dose Dependence of the Enhancement of Thermal Oxidation for 6H-SiC by 30 keV 18 O + and 20 Ne + Irradiation
Yoneda, Tomoaki, Nakata, Toshitake, Kitabatake, Makoto, Kido, YoshiakiVolume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.6262
Date:
November, 1998
File:
PDF, 700 KB
1998