Highly Conducting Undoped µc-SiO:H Films Prepared by RF Glow Discharge
Das, Debajyoti, Barua, Asok K.Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.L697
Date:
July, 1999
File:
PDF, 423 KB
english, 1999