Breakdown and Recovery of Thin Gate Oxides

Breakdown and Recovery of Thin Gate Oxides

Bearda, Twan, Mertens, Paul W., Heyns, Marc M., Wallinga, Hans, Woerlee, Pierre
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Volume:
39
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.39.L582
Date:
June, 2000
File:
PDF, 84 KB
english, 2000
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