Characterization of Silicon Nitride Thin Films on Si and...

Japanese Journal of Applied Physics 2001 / 6 Vol. 40; Iss. Part 1, No

Characterization of Silicon Nitride Thin Films on Si and Overlayer Growth of Si and Ge

Wang, Xue-Sen, Li, Zongquan, Wang, Lei, Hu, Yanfang, Zhai, Guangjie, Yang, Jianshu, Wang, Yuqi, Fung, Kwok-Kwong, Tang, Jing-Chang, Wang, Xun, Cue, Nelson
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Volume:
40
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.4292
Date:
June, 2001
File:
PDF, 1.43 MB
2001
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