Effects of Annealing on Tantalum Pentoxide Films in N...

Japanese Journal of Applied Physics 2001 / 8 Vol. 40; Iss. Part 1, No

Effects of Annealing on Tantalum Pentoxide Films in N 2 and N 2 O Gas Environments

Houng, Mau-Phon, Wang, Yeong-Her, Horng, Jui-Hong, Huang, Rui-Chang
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.5079
Date:
August, 2001
File:
PDF, 577 KB
english, 2001
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