Crystalline Structure and Surface Morphology of AlN Films...

Japanese Journal of Applied Physics 2001 / 2 Vol. 40; Iss. Part 1, No

Crystalline Structure and Surface Morphology of AlN Films Sputtered on Rotated Y-Cut Quartz (ST-Quartz)

Wu, Sean, Wu, Long, Shen, Yu-Tang, Chang, Feng-Chih
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Volume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.40.794
Date:
February, 2001
File:
PDF, 119 KB
english, 2001
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