Oxygen Plasma Damage in GaAs Directly Exposed to...

Japanese Journal of Applied Physics 2002 / 9 Vol. 41; Iss. Part 1, No

Oxygen Plasma Damage in GaAs Directly Exposed to Surface-Wave Plasma

Aoki, Katsuaki, Uekusa, Shin-ichiro, Katsumata, Hiroshi
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.5762
Date:
September, 2002
File:
PDF, 74 KB
english, 2002
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