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A Theoretical Study on the Realistic Low Concentration Doping in Silicon Semiconductors by Accelerated Quantum Chemical Molecular Dynamics Method
Yokosuka, Toshiyuki, Sasata, Katsumi, Kurokawa, Hitoshi, Takami, Seiichi, Kubo, Momoji, Imamura, Akira, Kitahara, Yoshiyuki, Kanoh, Masaaki, Miyamoto, AkiraVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.1877
Date:
April, 2003
File:
PDF, 218 KB
english, 2003