Specular Surface Morphology of Aluminum-Implanted...

Japanese Journal of Applied Physics 2004 / 1 Vol. 43; Iss. 1

Specular Surface Morphology of Aluminum-Implanted 4H-SiC(000\bar1) by SiH 4 -Added Ar Anneal

Fujihira, Keiko, Tarui, Yoichiro, Imaizumi, Masayuki, Ohtsuka, Ken-ichi, Takami, Tetsuya, Ozeki, Tatsuo
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.115
Date:
January, 2004
File:
PDF, 611 KB
english, 2004
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