Nondestructive Characterization of a Series of Periodic...

Nondestructive Characterization of a Series of Periodic Porous Silica Films by in situ Spectroscopic Ellipsometry in a Vapor Cell

Negoro, Chie, Hata, Nobuhiro, Yamada, Kazuhiro, Kikkawa, Takamaro
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Volume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.1327
Date:
April, 2004
File:
PDF, 984 KB
english, 2004
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