Nondestructive Characterization of a Series of Periodic Porous Silica Films by in situ Spectroscopic Ellipsometry in a Vapor Cell
Negoro, Chie, Hata, Nobuhiro, Yamada, Kazuhiro, Kikkawa, TakamaroVolume:
43
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.43.1327
Date:
April, 2004
File:
PDF, 984 KB
english, 2004