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Interpretation of Dominant Impurities in Cu Films by Secondary Ion Mass Spectrometry and Glow Discharge Mass Spectrometry
Lim, Jae-Won, Bae, Joon Woo, Mimura, Kouji, Isshiki, MinoruVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.373
Date:
January, 2005
File:
PDF, 90 KB
english, 2005