Combinatorial Arc Plasma Deposition of Thin Films

Japanese Journal of Applied Physics 2006 / 4 Vol. 45; Iss. 4A

Combinatorial Arc Plasma Deposition of Thin Films

Hata, Seiichi, Yamauchi, Ryusuke, Sakurai, Junpei, Shimokohbe, Akira
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.2708
Date:
April, 2006
File:
PDF, 1.57 MB
english, 2006
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