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Combinatorial Arc Plasma Deposition of Thin Films
Hata, Seiichi, Yamauchi, Ryusuke, Sakurai, Junpei, Shimokohbe, AkiraVolume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.2708
Date:
April, 2006
File:
PDF, 1.57 MB
english, 2006