Effect of Pulse Duration on Formation of Ultrashallow...

Japanese Journal of Applied Physics 2006 / 11 Vol. 45; Iss. 11

Effect of Pulse Duration on Formation of Ultrashallow Junction by Excimer Laser Annealing

Matsuno, Akira, Shibahara, Kentaro
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Volume:
45
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.45.8537
Date:
November, 2006
File:
PDF, 569 KB
2006
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