A Novel Method for Fabrication of Plastic Microlens Array...

A Novel Method for Fabrication of Plastic Microlens Array with Aperture Stops for Projection Photolithography

Chang, Chih-Yuan, Yang, Sen-Yeu, Wu, Meng-Sheng, Jiang, Liang-Ting, Wang, Lon A.
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.2932
Date:
May, 2007
File:
PDF, 234 KB
english, 2007
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