A Novel Method for Fabrication of Plastic Microlens Array with Aperture Stops for Projection Photolithography
Chang, Chih-Yuan, Yang, Sen-Yeu, Wu, Meng-Sheng, Jiang, Liang-Ting, Wang, Lon A.Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.2932
Date:
May, 2007
File:
PDF, 234 KB
english, 2007