Hydrogen-Controlled Crystallinity of 3C-SiC Film on Si(001)...

Japanese Journal of Applied Physics 2007 / 1 Vol. 46; Iss. No. 2

Hydrogen-Controlled Crystallinity of 3C-SiC Film on Si(001) Grown with Monomethylsilane

Narita, Yuzuru, Konno, Atsushi, Nakazawa, Hideki, Itoh, Takashi, Yasui, Kanji, Endoh, Tetsuo, Suemitsu, Maki
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Volume:
46
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.46.L40
Date:
January, 2007
File:
PDF, 248 KB
english, 2007
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